Associating data with workpieces and correlating the data with yield data
US8321048B1 · kind B1 · utility
39Cited by
16References
21Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 28, 2002 |
| Grant date | Nov 27, 2012 |
| Priority date | — |
| Expiry date | Feb 19, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method and apparatus is provided for associating operational data with workpieces and correlating the operational data with yield data. The method comprises processing a workpiece using a processing tool, associating the operational data with the workpiece during the processing of the workpiece and measuring the yield data associated with the processed workpiece. The method further comprises correlating the operational data with the yield data to make one or more determinations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.