Ultraviolet reflector with coolant gas holes and method
US8338809B2 · kind B2 · utility
391Cited by
12References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 20, 2011 |
| Grant date | Dec 25, 2012 |
| Priority date | — |
| Expiry date | Jun 20, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K2201/067
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A reflector for an ultraviolet lamp can be used in a substrate processing apparatus. The reflector comprises a centrally positioned longitudinal strip and first and second side reflectors to form a parabolic-type surface. The longitudinal strip and first and second side reflectors have curved reflective surfaces with dichroic coatings and the longitudinal strip comprises a plurality of through holes to direct a coolant gas toward the ultraviolet lamp. A chamber that uses an ultraviolet lamp module with the reflector, and a method of ultraviolet treatment are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.