Reusable test chip for inline probing of three dimensionally arranged experiments
US8362480B1 · kind B1 · utility
8Cited by
4References
9Claims
0Family size
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Key dates
| Filing date | Sep 25, 2007 |
| Grant date | Jan 29, 2013 |
| Priority date | — |
| Expiry date | Dec 19, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/34
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A Characterization Vehicle (CV) and a method for forming it which yields a gain in efficiency for IC yield ramp improvements by enabling faster learning cycles and diagnosis while reducing costs. A plurality of SF experiments are combined into a single full flow mask set with many inline testing points. Smaller pads are arranged in a way supporting testing of interleaved pad frames, parallel testing, and the usage of stacked test structures, or Devices Under Test (DUT's).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.