Vapor based combinatorial processing
US8409354B2 · kind B2 · utility
8Cited by
2References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2011 |
| Grant date | Apr 2, 2013 |
| Priority date | — |
| Expiry date | Dec 21, 2031 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45548
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A combinatorial processing chamber and method are provided. In the method a fluid volume flows over a surface of a substrate with differing portions of the fluid volume having different constituent components to concurrently expose segregated regions of the substrate to a mixture of the constituent components that differ from constituent components to which adjacent regions are exposed. Differently processed segregated regions are generated through the multiple flowings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.