Inventor · Santa Clara, CA, US

Sunil Shanker

51Patents
15h-index
34Co-inventors
80Inventor score

Filing activity: Mar 16, 2005 → Oct 2, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US7915139B1 CVD flowable gap fill Electricity 775 Active
US7582555B1 CVD flowable gap fill Electricity 563 Expired
US7888233B1 Flowable film dielectric gap fill process Electricity 543 Active
US7514375B1 Pulsed bias having high pulse frequency for filling gaps with dielectric material Electricity 530 Active
US8440259B2 Vapor based combinatorial processing Chemistry; Metallurgy 518 Active
US7211525B1 Hydrogen treatment enhanced gap fill Electricity 498 Expired
US7524735B1 Flowable film dielectric gap fill process Electricity 124 Active
US8143092B2 Methods for forming resistive switching memory elements by heating deposited layers Electricity 88 Active
US8580697B1 CVD flowable gap fill Electricity 34 Active
US8294219B2 Nonvolatile memory element including resistive switching metal oxide layers Electricity 31 Active
US7951683B1 In-situ process layer using silicon-rich-oxide for etch selectivity in high AR gapfill Electricity 27 Active
US8481403B1 Flowable film dielectric gap fill process Electricity 24 Active
US8809161B2 Flowable film dielectric gap fill process Electricity 19 Active
US7727906B1 H2-based plasma treatment to eliminate within-batch and batch-to-batch etch drift Electricity 16 Active
US8334015B2 Vapor based combinatorial processing Chemistry; Metallurgy 15 Active
US8318572B1 Inexpensive electrode materials to facilitate rutile phase titanium oxide Electricity 12 Active
US8129288B2 Combinatorial plasma enhanced deposition techniques Electricity 9 Active
US8409354B2 Vapor based combinatorial processing Chemistry; Metallurgy 8 Active
US8821987B2 Combinatorial processing using a remote plasma source Chemistry; Metallurgy 8 Active
US8278735B2 Yttrium and titanium high-k dielectric films Electricity 6 Active
US7968452B2 Titanium-based high-K dielectric films Emerging Cross-Sectional Technologies 5 Active
US8354702B1 Inexpensive electrode materials to facilitate rutile phase titanium oxide Electricity 5 Active
US8153535B1 Combinatorial plasma enhanced deposition techniques Electricity 5 Active
US7927947B2 Methods for depositing high-K dielectrics Electricity 5 Active
US8828821B2 Fabrication of semiconductor stacks with ruthenium-based materials Electricity 4 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.