MIM capacitor with enhanced capacitance
US8424177B2 · kind B2 · utility
1Cited by
8References
10Claims
0Family size
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Key dates
| Filing date | May 6, 2010 |
| Grant date | Apr 23, 2013 |
| Priority date | — |
| Expiry date | Jun 30, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of forming a metal-insulator-metal capacitor having top and bottom plates separated by a dielectric layer, one of the top and bottom plates having at least one protrusion extending into a corresponding cavity in the other of the top and bottom plates, the method including the steps of growing one or more nanofibers on a base surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.