Patent · US Active

Electron beam device

US8431894B2 · kind B2 · utility

2Cited by

18References

35Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Erik Essers · Aalen, DE
Gerd Benner · Aalen, DE
Volker Drexel · Oberkochen, DE

Key dates

Filing date	Jul 28, 2005
Grant date	Apr 30, 2013
Priority date	—
Expiry date	Sep 25, 2026

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2449
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An electron beam device has an electron gun for generating an electron beam, an objective lens for focusing the electron beam on an object and at least one detector for detecting electrons emitted by the object or electrons backscattered by the object. Detection of electrons emitted by or backscattered by an object may be simplified and improved using quadrupole devices and certain configurations of these devices provided in the electron beam device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.