Patent · US Active

Multi-chamber carrier head with a textured membrane

US8454413B2 · kind B2 · utility

6Cited by

10References

5Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Jeonghoon Oh · San Jose, US
Tsz-Sin Siu · Kwai Chung, CN
Hung Chih Chen · San Jose, US
Andrew J. Nagengast · Sunnyvale, US
Steven M. Zuniga · Soquel, US
Thomas Brezoczky · Los Gatos, US

Key dates

Filing date	Dec 21, 2006
Grant date	Jun 4, 2013
Priority date	—
Expiry date	Mar 30, 2030

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB29L2031/755
WIPO fieldOther special machines
WIPO sectorMechanical engineering

Abstract

A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.