Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method
US8456186B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 27, 2007 |
| Grant date | Jun 4, 2013 |
| Priority date | — |
| Expiry date | Jul 6, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2886
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A reliability evaluation test apparatus of this invention includes a wafer storage section which stores a wafer in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor are totally in electrical contact with each other. The wafer storage section transmits/receives a test signal to/from a measurement section and has a hermetic and heat insulating structure. The wafer storage section has a pressure mechanism which presses the contactor and a heating mechanism which directly heats the wafer totally in contact with the contactor to a predetermined high temperature. The reliability of an interconnection film and insulating film formed on the semiconductor wafer are evaluated under an accelerated condition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.