Patent · US Active

Method for testing a test substrate under defined thermal conditions and thermally conditionable prober

US8497693B2 · kind B2 · utility

8Cited by

5References

16Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Joerg Kiesewetter · Sacka, DE
Stojan Kanev · Sacka, DE
Michael Teich · Mannheim, DE
Karsten Stoll · Wilthen, DE
Axel Schmidt · Munich, DE

Key dates

Filing date	Oct 1, 2008
Grant date	Jul 30, 2013
Priority date	—
Expiry date	Jan 26, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2874
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.