Variable resistance memory device and methods of forming the same
US8558348B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 13, 2012 |
| Grant date | Oct 15, 2013 |
| Priority date | — |
| Expiry date | Aug 13, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11C2213/72
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method of forming a memory device includes forming a first interlayer insulating layer on a semiconductor substrate, forming a first electrode in the first interlayer insulating layer, the first electrode having a top surface of a rectangular shape extending in a first direction, and forming a variable resistance pattern on the first electrode, the variable resistance pattern having a bottom surface of a rectangular shape extending in a second direction crossing the first direction, the bottom surface of the variable resistance pattern contacting the first electrode, wherein the area of contact between the lower electrode and the variable resistance pattern is substantially equal to a multiplication of a minor axis length of a top surface of the first electrode and a minor axis length of a bottom surface of the variable resistance pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.