Stable wafer-carrier system
US8562745B2 · kind B2 · utility
6Cited by
4References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2010 |
| Grant date | Oct 22, 2013 |
| Priority date | — |
| Expiry date | Dec 29, 2031 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B35/005
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
One embodiment of the present invention provides a wafer-carrier system used in a deposition chamber for carrying wafers. The wafer-carrier system includes a base susceptor and a top susceptor nested inside the base susceptor with its wafer-mounting side facing the base susceptor's wafer-mounting side, thereby forming a substantially enclosed narrow channel. The base susceptor provides an upward support to the top susceptor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.