Patent · US Active

Slit valve door able to compensate for chamber deflection

US8567756B2 · kind B2 · utility

1Cited by

6References

6Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Mehran Behdjat · San Jose, US
Shinichi Kurita · San Jose, US
John M. White · Hayward, US
Suhail Anwar · San Jose, US
Makoto Inagawa · Palo Alto, US

Key dates

Filing date	Aug 27, 2009
Grant date	Oct 29, 2013
Priority date	—
Expiry date	Jun 4, 2032

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF16K51/02
WIPO fieldMechanical elements
WIPO sectorMechanical engineering

Abstract

Embodiments disclosed herein generally relate to a slit valve door assembly for sealing an opening in a chamber. A slit valve door that is pressed against the chamber to seal the slit valve opening moves with the chamber as the slit valve opening shrinks so that an o-ring pressed between the slit valve door and the chamber may move with the slit valve door and the chamber. Thus, less rubbing of the o-ring against the chamber may occur. With less rubbing, fewer particles may be generated and the o-ring lifetime may be extended. With a longer lifetime for the o-ring, substrate throughput may be increased.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.