Patent · US Active

Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin

US8608146B2 · kind B2 · utility

7Cited by

17References

15Claims

0Family size

Assignee

Lam Research Corporation · US

Inventors

Michael Brugger · Seeboden, AT
Otto Lach · Velden am Wörther See, AT
Dietmar Hammer · Velden am Wörther See, AT

Key dates

Filing date	Dec 18, 2009
Grant date	Dec 17, 2013
Priority date	—
Expiry date	Dec 28, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/68757
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Improved durability and longevity of spin chucks is achieved by using a composite support pin structure in which a pin body of a chemically inert plastic includes a hollow cavity containing an insert formed from a material whose Young's modulus is greater than that of the inert plastic.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.