Otto Lach
7Patents
4h-index
9Co-inventors
39Inventor score
Filing activity: Dec 18, 2009 → Oct 12, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8608146B2 | Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin | Electricity | 7 | Active |
| US9093482B2 | Method and apparatus for liquid treatment of wafer shaped articles | Electricity | 6 | Active |
| US9484229B2 | Device and method for processing wafer-shaped articles | Emerging Cross-Sectional Technologies | 4 | Active |
| US9190310B2 | Grounded chuck | Emerging Cross-Sectional Technologies | 4 | Active |
| US9147593B2 | Apparatus for liquid treatment of wafer shaped articles | Emerging Cross-Sectional Technologies | 3 | Active |
| US8613288B2 | High temperature chuck and method of using same | Electricity | 0 | Active |
| US9130002B2 | Device for holding wafer shaped articles | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.