Michael Brugger
18Patents
4h-index
25Co-inventors
56Inventor score
Filing activity: Oct 24, 2003 → Aug 24, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9245777B2 | Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus | Electricity | 9 | Active |
| USD493377S1 | Retractable chalk line | General | 8 | Expired |
| US8608146B2 | Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin | Electricity | 7 | Active |
| US9093482B2 | Method and apparatus for liquid treatment of wafer shaped articles | Electricity | 6 | Active |
| US9190310B2 | Grounded chuck | Emerging Cross-Sectional Technologies | 4 | Active |
| US8231939B2 | Device and method for wet treating plate-like-articles | Electricity | 2 | Active |
| US8029641B2 | Device and method for liquid treatment of wafer-shaped articles | Electricity | 2 | Active |
| US9536770B2 | Method and apparatus for liquid treatment of wafer shaped articles | Emerging Cross-Sectional Technologies | 2 | Active |
| US8888952B2 | Apparatus for wet treatment of plate-like articles | Electricity | 2 | Active |
| US11195695B2 | Ion implantation method, ion implantation apparatus and semiconductor device | Electricity | 1 | Active |
| US9972514B2 | Apparatus for liquid treatment of wafer shaped articles | Electricity | 1 | Active |
| US10037887B2 | Method for implanting ions into a semiconductor substrate and an implantation system | Electricity | 1 | Active |
| US8936832B2 | Device and method for wet treating plate-like-articles | Electricity | 1 | Active |
| US8974632B2 | Device and method for treating wafer-shaped articles | Electricity | 0 | Active |
| US9887120B2 | Apparatus for treating surfaces of wafer-shaped articles | Emerging Cross-Sectional Technologies | 0 | Active |
| US8613288B2 | High temperature chuck and method of using same | Electricity | 0 | Active |
| US9997379B2 | Method and apparatus for wafer wet processing | Electricity | 0 | Active |
| US9685358B2 | Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.