Process for MEMS scanning mirror with mass remove from mirror backside
US8636911B2 · kind B2 · utility
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23References
19Claims
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Key dates
| Filing date | Oct 7, 2010 |
| Grant date | Jan 28, 2014 |
| Priority date | — |
| Expiry date | May 7, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/042
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Two methods of fabricating a MEMS scanning mirror having a tunable resonance frequency are described. The resonance frequency of the mirror is set to a particular value by mass removal from the backside of the mirror during fabrication.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.