Patent · US Active

Sensor and method for its production

US8749013B2 · kind B2 · utility

1Cited by

1References

19Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Hubert Benzel · Neckartenzlingen, DE
Simon Armbruster · Wannweil, DE
Arnim Hoechst · Lörrach, DE
Christoph Schelling · Stuttgart, DE
Ando Feyh · Palo Alto, US

Key dates

Filing date	Apr 23, 2007
Grant date	Jun 10, 2014
Priority date	—
Expiry date	Oct 16, 2030

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/0109
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor, in particular for the spatially resolved detection, includes a substrate, at least one micropatterned sensor element having an electric characteristic whose value varies as a function of the temperature, and at least one diaphragm above a cavity, the sensor element being disposed on the underside of the at least one diaphragm, and the sensor element being contacted via connecting lines, which extend within, on top of or underneath the diaphragm. In particular, a plurality of sensor elements may be formed as diode pixels within a monocrystalline layer formed by epitaxy. Suspension springs, which accommodate the individual sensor elements in elastic and insulating fashion, may be formed within the diaphragm.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.