Teruyuki Watanabe
14Patents
5h-index
14Co-inventors
55Inventor score
Filing activity: Jun 11, 2003 → Feb 16, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7087117B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7368016B2 | Substrate processing unit and substrate processing apparatus | Electricity | 10 | Expired |
| US7442257B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 8 | Active |
| US7575636B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 7 | Active |
| US7235135B2 | Substrate processing apparatus and substrate processing method | Electricity | 7 | Expired |
| US7585205B2 | Substrate polishing apparatus and method | Emerging Cross-Sectional Technologies | 5 | Active |
| US8777198B2 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Electricity | 2 | Active |
| US8141513B2 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Electricity | 1 | Active |
| US7886685B2 | Substrate holding apparatus, substrate holding method, and substrate processing apparatus | Electricity | 1 | Active |
| US7976362B2 | Substrate polishing apparatus and method | Emerging Cross-Sectional Technologies | 1 | Active |
| US8225803B2 | Substrate processing method and apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US7735450B2 | Substrate holding apparatus | Electricity | 0 | Active |
| US7959977B2 | Substrate processing method and apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
| US7735451B2 | Substrate processing method and apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.