Method for measuring an optical system

US8786849B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Thomas Korb · Schwäbisch Gmünd, DE
• Christian Hettich · Konstanz, DE
• Michael Layh · Altusried, DE
• Ulrich Wegmann · Oberkochen, DE
• Karl-Heinz Schuster · Oberkochen, DE
• Matthias Manger · Neukochen, DE

Key dates

• Filing date: Jun 7, 2013
• Grant date: Jul 22, 2014
• Expiry date: Jun 7, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/7085
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

First test beams (464a-d), after passing through an optical system on optical paths that differ in pairs, impinge on a first measurement region (461) at angles that differ in pairs with respect to the measurement plane. Second test beams (465a-d), after passing through the optical system on optical paths that differ in pairs, impinge on a second measurement region (462) at angles that differ in pairs, wherein the second region differs from the first. A value of a first measurement variable of the test beam at the first region is detected for each of the first test beams, and comparably for a second measurement variable at the second region for the second test beams. Impingement regions (467a-d) on reference surface(s) (466, 471) of the optical system are determined and a spatial diagnosis distribution of a property of the reference surface(s) for each test beam is calculated.