Gas transport delay resolution for short etch recipes
US8794267B2 · kind B2 · utility
12Cited by
18References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2008 |
| Grant date | Aug 5, 2014 |
| Priority date | — |
| Expiry date | Dec 12, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.