Inline defect analysis for sampling and SPC

US8799831B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Youval Nehmadi · Holon, IL
• Rinat Shimshi · San Jose, US
• Vicky Svidenko · San Jose, US
• Alexander T. Schwarm · Austin, US
• Sundar Jawaharlal · Glen Allen, US

Key dates

• Filing date: May 22, 2008
• Grant date: Aug 5, 2014
• Expiry date: Feb 8, 2031

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/318511
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In one embodiment, an inline defect analysis method includes receiving geometric characteristics of individual defects and design data corresponding to the individual defects, determining which of the individual defects are likely to be nuisance defects using the geometric characteristics and the corresponding design data, and refraining from sampling the defects that are likely to be nuisance defects.