Ion energy analyzer and methods of manufacturing the same
US8816281B2 · kind B2 · utility
6Cited by
17References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 28, 2012 |
| Grant date | Aug 26, 2014 |
| Priority date | — |
| Expiry date | Aug 23, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A process by which an ion energy analyzer is manufactured includes processing a first substrate to form an entrance grid having a first channel and a first plurality of openings extending therethrough. A second substrate is processed to form a selection grid having a second channel therein and a second plurality of openings extending therethrough. A third substrate is processed to form an ion collector having a third channel therein. The entrance grid is operably coupled to, and electrically isolated from, the selection grid, which is, in turn, operably coupled to, and electrically isolated from, the ion collector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.