Inventor · Austin, TX, US

Barton Lane

40Patents
8h-index
37Co-inventors
75Inventor score

Filing activity: Jun 23, 1989 → Oct 13, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US5061838A Toroidal electron cyclotron resonance reactor Electricity 324 Expired
US10991554B2 Plasma processing system with synchronized signal modulation Electricity 40 Active
US7757541B1 Techniques for calibration of gas flows Physics 18 Active
US7937232B1 Data timestamp management Physics 17 Active
US5256854A Tunable plasma method and apparatus using radio frequency heating and electron beam irradiation Human Necessities 13 Expired
US9396900B2 Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties Electricity 10 Active
US7871830B2 End point detection method for plasma etching of semiconductor wafers with low exposed area Electricity 9 Active
US8393197B2 Method and apparatus for the measurement of atmospheric leaks in the presence of chamber outgassing Physics 8 Active
US8237928B2 Method and apparatus for identifying the chemical composition of a gas Physics 7 Active
US7695984B1 Use of modeled parameters for real-time semiconductor process metrology applied to semiconductor processes Electricity 7 Active
US8816281B2 Ion energy analyzer and methods of manufacturing the same Emerging Cross-Sectional Technologies 6 Active
US9087677B2 Methods of electrical signaling in an ion energy analyzer Emerging Cross-Sectional Technologies 5 Active
US8847159B2 Ion energy analyzer Emerging Cross-Sectional Technologies 5 Active
US7940395B2 Method and apparatus for identifying the chemical composition of a gas Physics 5 Active
US10002744B2 System and method for controlling plasma density Electricity 4 Active
US11600474B2 RF voltage and current (V-I) sensors and measurement methods Electricity 3 Active
US11348761B2 Impedance matching apparatus and control method Electricity 3 Active
US8501499B2 Adaptive recipe selector Electricity 2 Active
US11817296B2 RF voltage and current (V-I) sensors and measurement methods Electricity 1 Active
US11515122B2 System and methods for VHF plasma processing Electricity 1 Active
US10861679B2 Resonant structure for a plasma processing system Electricity 1 Active
US11410832B2 RF measurement system and method Electricity 1 Active
US11201035B2 Radical source with contained plasma Electricity 1 Active
US11393663B2 Methods and systems for focus ring thickness determinations and feedback control Electricity 1 Active
US12261017B2 Resonant antenna for physical vapor deposition applications Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.