Patent · US Active

Device and method for loosening a polymer layer from a surface of a substrate

US8828147B2 · kind B2 · utility

0Cited by

0References

15Claims

0Family size

Assignee

EV Group GmbH · AT

Inventors

Matt Crowder · Redlands, US
Ronald Holzleitner · Gmunden, AT
Thomas Glinsner · Ried im Innkreis, AT
Friedrich Paul Lindner · Ried im Innkreis, AT
Erich Thallner · St. Florian, AT

Key dates

Filing date	Apr 1, 2011
Grant date	Sep 9, 2014
Priority date	—
Expiry date	Mar 26, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67109
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

The invention relates to a device for loosening a polymer layer from a surface of a substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.