Angle-resolved antisymmetric scatterometry
US8848186B2 · kind B2 · utility
5Cited by
5References
17Claims
0Family size
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Key dates
| Filing date | Jul 21, 2010 |
| Grant date | Sep 30, 2014 |
| Priority date | — |
| Expiry date | Nov 22, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/56
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for determining an overlay offset may include, but is not limited to: obtaining a first anti-symmetric differential signal (ΔS1) associated with a first scatterometry cell; obtaining a second anti-symmetric differential signal (ΔS2) associated with a second scatterometry cell and computing an overlay offset from the first anti-symmetric differential (ΔS1) signal associated with the first scatterometry cell and the second anti-symmetric differential signal (ΔS2) associated with the second scatterometry cell.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.