Systems and methods for measuring, monitoring and controlling ozone concentration
US8851010B2 · kind B2 · utility
0Cited by
2References
12Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 12, 2011 |
| Grant date | Oct 7, 2014 |
| Priority date | — |
| Expiry date | Jan 8, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02A50/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods to determine ozone concentration in a gas mixture of ozone and oxygen, based on measurements of the total gas mixture properties, can enable the measurements of ozone concentration at low pressure settings. The ozone concentration determination can be applied to vacuum processing chamber, using either novel ozone sensor or existing mass flow meter or controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.