Methods and apparatus for marangoni substrate drying using a vapor knife manifold
US8869422B2 · kind B2 · utility
6Cited by
19References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 27, 2012 |
| Grant date | Oct 28, 2014 |
| Priority date | — |
| Expiry date | Dec 27, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67034
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides methods and apparatus for a Marangoni vapor knife assembly. The assembly includes a base having a channel extending longitudinally through the base and a plurality of passages extending laterally from the channel toward an outer face of the base; a top plate adapted to be removeably coupled to the base with an outer face flush with the outer face of the base; and a shim adapted to be disposed between the base and the top plate and further adapted to form a plurality of spray orifices in the assembly. Numerous additional features are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.