Patent · US Active

Discrete polarization scatterometry

US8896832B2 · kind B2 · utility

15Cited by
10References
35Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 16, 2011
Grant dateNov 25, 2014
Priority date—
Expiry dateMar 15, 2032

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2021/4792
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Systems and methods for discrete polarization scatterometry are provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.