Systems and methods for measuring, monitoring and controlling ozone concentration
US8925481B2 · kind B2 · utility
1Cited by
4References
15Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 12, 2011 |
| Grant date | Jan 6, 2015 |
| Priority date | — |
| Expiry date | Mar 28, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0402
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods to determine ozone concentration in a gas mixture of ozone and oxygen, based on measurements of a total mass flow and a corresponding change in a chamber pressure accepting the mixture flow, can enable the measurements of ozone concentration at low pressure settings. The ozone concentration determination can be applied to a vacuum processing chamber, enabling precision semiconductor processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.