Alkyl-substituted allyl carbonyl metal complexes and use thereof for preparing dielectric thin films
US8927748B2 · kind B2 · utility
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26Claims
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Key dates
| Filing date | Aug 8, 2012 |
| Grant date | Jan 6, 2015 |
| Priority date | — |
| Expiry date | Nov 17, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/76841
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Organometallic complexes and use thereof in thin film deposition, such as CVD and ALD are provided herein. The organometallic complexes are (alkyl-substituted η3-allyl)(carbonyl)metal complexes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.