Gas delivery system and method of use thereof
US8931512B2 · kind B2 · utility
3Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 7, 2012 |
| Grant date | Jan 13, 2015 |
| Priority date | — |
| Expiry date | Oct 19, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87684
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Methods and apparatus for delivery of gas are provided herein. In some embodiments, a gas delivery system may include a premix tank having an inlet and an outlet; a plurality of gas supplies coupled to the inlet of the premix tank; a plurality of valves, each valve respectively disposed in line with a corresponding one of the plurality of gas supplies; and a conduit coupling the outlet of the premix tank to one or more gas delivery zones.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.