Ezra Robert Gold
27Patents
7h-index
32Co-inventors
65Inventor score
Filing activity: Mar 10, 2006 → Oct 28, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8231799B2 | Plasma reactor apparatus with multiple gas injection zones having time-changing separate configurable gas compositions for each zone | Electricity | 532 | Expired |
| US7846497B2 | Method and apparatus for controlling gas flow to a processing chamber | Emerging Cross-Sectional Technologies | 23 | Active |
| US7540971B2 | Plasma etch process using polymerizing etch gases across a wafer surface and additional polymer managing or controlling gases in independently fed gas zones with time and spatial modulation of gas content | Electricity | 13 | Active |
| US7775236B2 | Method and apparatus for controlling gas flow to a processing chamber | Emerging Cross-Sectional Technologies | 13 | Active |
| US7431859B2 | Plasma etch process using polymerizing etch gases with different etch and polymer-deposition rates in different radial gas injection zones with time modulation | Electricity | 13 | Expired |
| US8074677B2 | Method and apparatus for controlling gas flow to a processing chamber | Emerging Cross-Sectional Technologies | 11 | Active |
| US7541292B2 | Plasma etch process with separately fed carbon-lean and carbon-rich polymerizing etch gases in independent inner and outer gas injection zones | Electricity | 9 | Active |
| US7743670B2 | Method and apparatus for gas flow measurement | Emerging Cross-Sectional Technologies | 5 | Active |
| US8048806B2 | Methods to avoid unstable plasma states during a process transition | Electricity | 4 | Active |
| US9565732B2 | Lighting nodes having a core node and sensor pods | Electricity | 4 | Active |
| US7975558B2 | Method and apparatus for gas flow measurement | Emerging Cross-Sectional Technologies | 4 | Active |
| US8931512B2 | Gas delivery system and method of use thereof | Emerging Cross-Sectional Technologies | 3 | Active |
| US7901952B2 | Plasma reactor control by translating desired values of M plasma parameters to values of N chamber parameters | Electricity | 2 | Active |
| US8895889B2 | Methods and apparatus for rapidly responsive heat control in plasma processing devices | Electricity | 1 | Active |
| US7452824B2 | Method of characterizing a chamber based upon concurrent behavior of selected plasma parameters as a function of plural chamber parameters | Electricity | 1 | Active |
| US7470626B2 | Method of characterizing a chamber based upon concurrent behavior of selected plasma parameters as a function of source power, bias power and chamber pressure | Electricity | 0 | Active |
| US12237682B2 | Efficient hierarchical distributed power storage | Emerging Cross-Sectional Technologies | 0 | Active |
| US8562742B2 | Apparatus for radial delivery of gas to a chamber and methods of use thereof | Emerging Cross-Sectional Technologies | 0 | Active |
| US7795153B2 | Method of controlling a chamber based upon predetermined concurrent behavior of selected plasma parameters as a function of selected chamber parameters | Electricity | 0 | Active |
| US11359769B2 | Gas cartridge loaded dispensing device | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US8616043B2 | Methods and apparatus for calibrating pressure gauges in a substrate processing system | Emerging Cross-Sectional Technologies | 0 | Active |
| US8616224B2 | Methods and apparatus for providing a gas mixture to a pair of process chambers | Emerging Cross-Sectional Technologies | 0 | Active |
| US9587789B2 | Methods and apparatus for providing a gas mixture to a pair of process chambers | Emerging Cross-Sectional Technologies | 0 | Active |
| US9088357B2 | Imaging system for passive alignment of engines | Electricity | 0 | Active |
| US9848474B2 | Lighting nodes having a core node and sensor pods | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.