Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus
US8975599B2 · kind B2 · utility
1Cited by
28References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 3, 2007 |
| Grant date | Mar 10, 2015 |
| Priority date | — |
| Expiry date | Oct 1, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7088
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention relates to an image sensor for detection of an aerial image formed by a beam of radiation in a lithographic projection apparatus for exposing a pattern onto a substrate held in a substrate plane by a substrate holder. The image sensor has an image detector and a lens. The lens is arranged to project at least part of the aerial image onto the image detector. The image sensor is positioned such within the substrate holder that the lens is positioned proximate the substrate plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.