Bearrach Moest
28Patents
5h-index
56Co-inventors
68Inventor score
Filing activity: Nov 23, 2004 → Nov 8, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7586108B2 | Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector | Emerging Cross-Sectional Technologies | 47 | Active |
| US8138485B2 | Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector | Electricity | 32 | Active |
| US7655367B2 | Lithographic apparatus and device manufacturing method | Physics | 5 | Active |
| US7675605B2 | Device and method for transmission image sensing | Physics | 5 | Active |
| US7282701B2 | Sensor for use in a lithographic apparatus | Physics | 5 | Expired |
| US7525638B2 | Lithographic apparatus and device manufacturing method | Physics | 5 | Active |
| US8426831B2 | Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector | Electricity | 4 | Active |
| US7453078B2 | Sensor for use in a lithographic apparatus | Physics | 4 | Active |
| US7583359B2 | Reduction of fit error due to non-uniform sample distribution | Physics | 2 | Active |
| US8773637B2 | Lithographic apparatus and device manufacturing method of applying a pattern to a substrate using sensor and alignment mark | Electricity | 2 | Active |
| US8436984B2 | Lithographic apparatus and method of irradiating at least two target portions | Physics | 2 | Active |
| US8975599B2 | Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatus | Physics | 1 | Active |
| US10705438B2 | Lithographic method | Physics | 0 | Active |
| US8860928B2 | Lithographic apparatus, computer program product and device manufacturing method | Physics | 0 | Active |
| US9116446B2 | Lithographic apparatus and method | Physics | 0 | Active |
| US9036130B2 | Device and method for transmission image sensing | Physics | 0 | Active |
| US8896817B2 | Lithographic projection apparatus, device manufacturing methods and mask with sensor and diffuser for use in a device manufacturing method | Physics | 0 | Active |
| US7145630B2 | Lithographic apparatus and device manufacturing method | Physics | 0 | Expired |
| US11644755B2 | Lithographic method | Physics | 0 | Active |
| US10571814B2 | Lithographic method | Physics | 0 | Active |
| US9329500B2 | Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor | Physics | 0 | Active |
| US8324598B2 | Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector | General | 0 | Revoked |
| US9857694B2 | Estimating deformation of a patterning device and/or a change in its position | Physics | 0 | Active |
| US11237490B2 | Lithographic apparatus and device manufacturing method | Physics | 0 | Active |
| US11199782B2 | Lithographic process and apparatus and inspection process and apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.