RF bus and RF return bus for plasma chamber electrode
US8992723B2 · kind B2 · utility
159Cited by
32References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2010 |
| Grant date | Mar 31, 2015 |
| Priority date | — |
| Expiry date | Jun 4, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32091
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
For coupling RF power from an RF input of a plasma chamber to the interior of a plasma chamber, an RF bus conductor is connected between the RF input and a plasma chamber electrode. In one embodiment, an RF return bus conductor is connected to an electrically grounded wall of the chamber, and the RF bus conductor and the RF return bus conductor have respective surfaces that are parallel and face each other. In another embodiment, the RF bus conductor has a transverse cross section having a longest dimension oriented perpendicular to the surface of the plasma chamber electrode that is closest to the RF bus conductor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.