Patent · US Active

Charged particle source with light monitoring for tip temperature determination

US8993981B2 · kind B2 · utility

0Cited by

4References

17Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

John A. Notte, IV · Gloucester, US
Randall G. Percival · Raymond, US
Milton Rahman · Peabody, US
Louise S. Barriss · North Reading, US
Russell Mello · Wakefield, US
Mark D. DiManna · Fremont, US

Key dates

Filing date	Oct 20, 2011
Grant date	Mar 31, 2015
Priority date	—
Expiry date	Oct 20, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/0807
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Systems and methods for heating an apex of a tip of a charged particle source are disclosed. The charged particle source can be, for example, a gas ion source. The systems can include a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle source and the detector so that the controller can control heating of the tip apex based on the light detected by the detector.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.