Cyclic amino compounds for low-k silylation
US8999734B2 · kind B2 · utility
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42References
15Claims
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Key dates
| Filing date | Mar 10, 2010 |
| Grant date | Apr 7, 2015 |
| Priority date | — |
| Expiry date | Oct 12, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02359
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed herein are mono-functional silylating compounds that may exhibit enhanced silylating capabilities. Also disclosed are method of synthesizing and using these compounds. Finally methods to determine effective silylation are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.