Controllable transmission and phase compensation of transparent material

US9034539B2 · kind B2 · utility

Assignees

• Carl Zeiss SMT GmbH · DE
• Carl Zeiss SMS Ltd. · IL

Inventors

• Sergey Oshemkov · Le Blanc-Mesnil, FR
• Ralph Klaesges · Aalen, DE
• Markus Mengel · Heidenheim, DE
• Vladimir Kruglyakov · Migdal HaEmek, IL
• Eitan Zait · Afula, IL
• Vladimir Dmitriev · Moran, IL
• Guy Ben-Zvi · Tamra, IL
• Steven Labovitz · Sunnyvale, US

Key dates

• Filing date: Jun 21, 2011
• Grant date: May 19, 2015
• Expiry date: Jan 23, 2032

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C03C23/0025
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A system for processing a substrate includes a light source to provide light pulses, a stage to support a substrate, optics to focus the light pulses onto the substrate, a scanner to scan the light pulses across the substrate, a computer to control properties of the light pulses and the scanning of the light pulses such that color centers are generated in various regions of the substrate, and at least one of (i) an ultraviolet light source to irradiate the substrate with ultraviolet light or (ii) a heater to heat the substrate after formation of the color centers to stabilize a transmittance spectrum of the substrate.