Substrate analysis using surface acoustic wave metrology
US9041931B2 · kind B2 · utility
4Cited by
8References
30Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Oct 8, 2010 |
| Grant date | May 26, 2015 |
| Priority date | — |
| Expiry date | Feb 29, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0423
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for imposing and analyzing surface acoustic waves in a substrate to determine characteristics of the substrate is disclosed. Optical elements and arrangements for imposing and analyzing surface acoustic waves in a substrate are also disclosed. NSOM's, gratings, and nanolight elements may be used to impose surface acoustic waves in a substrate and may also be used to measure transient changes in the substrate due to the passage of surface acoustic waves therethrough.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.