Christopher Morath
10Patents
4h-index
19Co-inventors
53Inventor score
Filing activity: Mar 6, 2002 → Jul 24, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6504618B2 | Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system | Physics | 17 | Expired |
| US7050178B2 | Method and apparatus for increasing signal to noise ratio in a photoacoustic film thickness measurement system | Physics | 12 | Expired |
| US7006221B2 | Metrology system with spectroscopic ellipsometer and photoacoustic measurements | Physics | 12 | Expired |
| US7019845B1 | Measuring elastic moduli of dielectric thin films using an optical metrology system | Physics | 6 | Expired |
| US9041931B2 | Substrate analysis using surface acoustic wave metrology | Physics | 4 | Active |
| US7522272B2 | Metrology system with spectroscopic ellipsometer and photoacoustic measurements | Physics | 4 | Active |
| US10985046B2 | Micro-LED transfer methods using light-based debonding | Electricity | 3 | Active |
| US7253887B2 | Metrology system with spectroscopic ellipsometer and photoacoustic measurements | Physics | 1 | Expired |
| US7705974B2 | Metrology system with spectroscopic ellipsometer and photoacoustic measurements | Physics | 0 | Active |
| US10571430B2 | Gas concentration sensors and systems | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.