Shared gas panels in plasma processing chambers employing multi-zone gas feeds
US9091397B2 · kind B2 · utility
2Cited by
7References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 13, 2012 |
| Grant date | Jul 28, 2015 |
| Priority date | — |
| Expiry date | May 21, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87249
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
Apparatus and methods for sharing a gas panel among a plurality of multi-zone gas feed chambers of a plasma processing chamber. Each multi-zone gas feed chamber is provided with its own multi-zone gas feed device to adjustably split the incoming gas flow into each chamber and provide the different gas flows to different zones of the multi-zone gas feed chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.