Method of forming step doping channel profile for super steep retrograde well field effect transistor and resulting device
US9099380B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Oct 10, 2014 |
| Grant date | Aug 4, 2015 |
| Priority date | — |
| Expiry date | Oct 10, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/85
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A methodology enabling the formation of steep channel profiles for devices, such as SSRW FETs, having a resultant channel profiles that enables suppression of threshold voltage variation and the resulting device are disclosed. Embodiments include providing STI regions in a silicon wafer; performing a deep well implantation of a dopant into the silicon wafer between STI regions; forming a recess in the doped silicon wafer between the STI regions; performing a shallow well implantation of the dopant into the silicon wafer in the recess; and forming Si:C on the doped silicon wafer in the recess.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.