Patent · US Active

Method and device for contacting a row of contact areas with probe tips

US9110131B2 · kind B2 · utility

3Cited by

18References

19Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Claus Dietrich · Sacka, DE
Stojan Kanev · Sacka, DE
Frank Fehrmann · Hengshan, TW
Botho Hirschfeld · Dresden, DE

Key dates

Filing date	Apr 13, 2010
Grant date	Aug 18, 2015
Priority date	—
Expiry date	Aug 6, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2891
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention generally relates to a method and device for contacting contact areas (22) with probe tips (18) in a tester. The contact areas (22), which are arranged on a substrate (6), and the probe tips (18) are positioned relative to each other and then brought in contact with each other by an advancing motion. In order to detect a secure contact for each of the probe tips (18), the contacting between the probe tips (18) and the contact areas (22) is observed from at least two observation directions (34), which include an observation angle α in a range of 0 to 180°.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.