Radiation shielding for a substrate holder
US9167625B2 · kind B2 · utility
5Cited by
215References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 14, 2012 |
| Grant date | Oct 20, 2015 |
| Priority date | — |
| Expiry date | Jan 21, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/68
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A reaction chamber including a substrate supporting member positioned within the reaction chamber, the reaction chamber having a first region and a second region, a shield positioned within the second chamber and movable with the substrate supporting member, and wherein the shield is adjacent at least a bottom surface of the substrate supporting member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.