Degassing apparatus adapted to process substrates in multiple tiers with second actuator

US9177842B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Eric A. Englhardt · Palo Alto, US
• Richard Giljum · Brentwood, US
• Jeffrey C. Hudgens · San Francisco, US
• Igor Kogan · San Francisco, US
• Michael R. Rice · Pleasanton, US
• Sushant S. Koshti · Sunnyvale, US

Key dates

• Filing date: Aug 9, 2012
• Grant date: Nov 3, 2015
• Expiry date: Jun 6, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68742
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Substrate transport systems, apparatus, and methods are described. In one aspect, the systems are disclosed having vertically stacked transfer chamber bodies. In one embodiment, a common robot apparatus services process chambers or load lock chambers coupled to upper and lower transfer chamber bodies. In another embodiment, separate robot apparatus service the process chambers and/or load lock chambers coupled to upper and lower transfer chamber bodies, and an elevator apparatus transfers the substrates between the various elevations. Degassing apparatus are described, as are numerous other aspects.