Igor Kogan
9Patents
8h-index
13Co-inventors
62Inventor score
Filing activity: Dec 16, 1994 → Aug 9, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5810931A | High aspect ratio clamp ring | Electricity | 48 | Expired |
| US5885428A | Method and apparatus for both mechanically and electrostatically clamping a wafer to a pedestal within a semiconductor wafer processing system | Electricity | 35 | Expired |
| US6276072A | Method and apparatus for heating and cooling substrates | Electricity | 31 | Expired |
| US6357143B2 | Method and apparatus for heating and cooling substrates | Electricity | 19 | Expired |
| US5868847A | Clamp ring for shielding a substrate during film layer deposition | Chemistry; Metallurgy | 19 | Expired |
| US6658763B2 | Method for heating and cooling substrates | Electricity | 14 | Expired |
| US6477787B2 | Method and apparatus for heating and cooling substrates | Electricity | 14 | Expired |
| US6929774B2 | Method and apparatus for heating and cooling substrates | Electricity | 9 | Expired |
| US9177842B2 | Degassing apparatus adapted to process substrates in multiple tiers with second actuator | Electricity | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.