Patent · US Active

Grounded chuck

US9190310B2 · kind B2 · utility

4Cited by

13References

17Claims

0Family size

Assignee

Lam Research Corporation · US

Inventors

Michael Brugger · Seeboden, AT
Otto Lach · Velden am Wörther See, AT

Key dates

Filing date	Apr 16, 2010
Grant date	Nov 17, 2015
Priority date	—
Expiry date	Jun 12, 2034

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T279/3493
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Improved reduction of static charge in spin chucks is achieved by providing one or more pin assemblies which are formed from chemically inert material and which include an electrically conductive inlay.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.