Method of investigating the wavefront of a charged-particle beam
US9202670B2 · kind B2 · utility
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19Claims
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Key dates
| Filing date | Dec 17, 2014 |
| Grant date | Dec 1, 2015 |
| Priority date | — |
| Expiry date | Dec 17, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2806
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of investigating a wavefront of a charged-particle beam that is directed from a source through an illuminator so as to traverse a sample plane and land upon a detector, an output of the detector being used in combination with a mathematical reconstruction technique so as to calculate at least one of phase information and amplitude information for the wavefront at a pre-defined location along its path to the detector, in which method:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.