Electrolytic copper process using anion permeable barrier
US9234293B2 · kind B2 · utility
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12Claims
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Key dates
| Filing date | Oct 6, 2014 |
| Grant date | Jan 12, 2016 |
| Priority date | — |
| Expiry date | Oct 6, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/423
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and a counter electrode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, a counter electrode, a second processing fluid, and an anion permeable barrier layer. The anion permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain anionic species to transfer between the two fluids.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.